OPTICAL ENCODER, AND DRIVING SYSTEM USING IT

摘要

PROBLEM TO BE SOLVED: To provide an optical encoder capable of accurately detecting two-dimensional direction relative displacement with a simple system structure. SOLUTION: This optical encoder is used for measuring a relative displacement amount of two objects each of which keeps a certain distance with respect to the other object and relatively displaces with respect to the other object. The optical encoder is provided with: first slits 103 formed on one of the objects and having a cyclic pattern, and second slits 104 arranged so as to cross them; a first light emitting means 111 formed on the other object for emitting first projection light; a first light collection means 112; a first light separation means 113; a first light reception means 114; a second light emitting means 121; a second light collection means 122; a second light separation means 123; and a second light reception means 124. COPYRIGHT: (C)2004,JPO&NCIPI