发明名称 HYBRID INTEGRATED CIRCUIT DEVICE
摘要 PROBLEM TO BE SOLVED: To solve the problem that occurrence and short circuit or the like of whiskers arc induced when a two-layer conductive path is formed on a bybrid integrate circuit board with a lower layer conductive path is undercut and an upper layer electrode is formed into an overhang. SOLUTION: A conductive path 11 consists of a first conductive path 14 formed on a lower layer and a second conductive path 15 formed on an upper layer. The second conductive path 15 is composed of a material having an etching rate smaller than the first conductive path 14. The ratio of the film thickness X of the second conductive path 15 to the projecting length Y of an overhang 16 from the first conductive path 14 of the second conductive path 15 is restricted to 0<Y/X≤1. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004200655(A) 申请公布日期 2004.07.15
申请号 JP20030369873 申请日期 2003.10.30
申请人 SANYO ELECTRIC CO LTD 发明人 IGARASHI YUUSUKE;WAKAI TAKASHI;SAKANO JUN;MOGI MASAMI
分类号 H01L23/12;(IPC1-7):H01L23/12 主分类号 H01L23/12
代理机构 代理人
主权项
地址