发明名称 |
HYBRID INTEGRATED CIRCUIT DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To solve the problem that occurrence and short circuit or the like of whiskers arc induced when a two-layer conductive path is formed on a bybrid integrate circuit board with a lower layer conductive path is undercut and an upper layer electrode is formed into an overhang. SOLUTION: A conductive path 11 consists of a first conductive path 14 formed on a lower layer and a second conductive path 15 formed on an upper layer. The second conductive path 15 is composed of a material having an etching rate smaller than the first conductive path 14. The ratio of the film thickness X of the second conductive path 15 to the projecting length Y of an overhang 16 from the first conductive path 14 of the second conductive path 15 is restricted to 0<Y/X≤1. COPYRIGHT: (C)2004,JPO&NCIPI
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申请公布号 |
JP2004200655(A) |
申请公布日期 |
2004.07.15 |
申请号 |
JP20030369873 |
申请日期 |
2003.10.30 |
申请人 |
SANYO ELECTRIC CO LTD |
发明人 |
IGARASHI YUUSUKE;WAKAI TAKASHI;SAKANO JUN;MOGI MASAMI |
分类号 |
H01L23/12;(IPC1-7):H01L23/12 |
主分类号 |
H01L23/12 |
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地址 |
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