Transparent oxide electrode film and manufacturing method thereof, transparent electroconductive base material, solar cell and photo detection element

摘要

A transparent oxide electrode film is provided to have crystalline indium oxide as its main component, in which the indium in the indium oxide is substituted with titanium at a titanium/indium atomic ratio between 0.003 and 0.120, and the resitivity of the transparent oxide electrode film is 5.7x10<-4 >Omegacm or less, so as to provide excellent transmittance for both the visible light region and the infrared light region, and low resistivity.