| 发明名称 |
Microfabrication apparatus and microfabrication method |
| 摘要 |
A microfabrication apparatus and a microfabrication method that, using a mechanical probe formed at its tip with a microscopic rod in sample preparation, can improve the life of the probe to 10 to 300 times from conventional 3 to 5 times in terms of the number of sample preparation enabling times.
|
| 申请公布号 |
US2004135096(A1) |
申请公布日期 |
2004.07.15 |
| 申请号 |
US20030603720 |
申请日期 |
2003.06.26 |
| 申请人 |
FUKUDA MUNEYUKI;TOMIMATSU SATOSHI;SHICHI HIROYASU;WATANABE OSAMU |
发明人 |
FUKUDA MUNEYUKI;TOMIMATSU SATOSHI;SHICHI HIROYASU;WATANABE OSAMU |
| 分类号 |
G01N23/04;G01N1/28;G01Q20/00;G01Q60/00;H01J37/02;H01J37/20;H01J37/30;H01J37/305;H01J37/317;(IPC1-7):H01J37/20 |
主分类号 |
G01N23/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
