DIAMOND FILM-FORMING SILICON AND ITS MANUFACTURING METHOD

摘要

(Problem) To provide a diamond electrode applicable industrially and a diamond film-forming silicon used for the diamond electrode. (Solving Means) A diamond film-forming silicon is used. On at least a part of the silicon base having a thickness of 500 mum or less, a film is formed of conductive diamond. Alternatively an electrode characterized by comprising a conductive support base and a diamond film-forming silicon is used. The diamond film-forming silicon has a flexibility, and hence it can be attached to a conductive support base, thereby easily producing a large-area electrode and a three-dimensionally shaped electrode.