| 摘要 |
PROBLEM TO BE SOLVED: To provide an object carrying device capable of increasing the moving stroke of an object carriage table without largely scaling the device. SOLUTION: A driving means 14 for driving an object carriage table 13 to the longitudinal direction of a linear guide 12 is configured of an ultrasonic linear motor 15 fixed to the object carriage table 13 and a metal traveling plate 16 having a motor sliding face 16a for making the ultrasonic linear motor 15 travel to the moving direction of the object carriage table 13. Also, the driving means 14 is provided with a heat conducting member 17 for conducting heat generated by the ultrasonic linear motor 15 to the metal traveling plate 16. COPYRIGHT: (C)2004,JPO&NCIPI
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