发明名称 CONVEYING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a conveying device configured to drive a carrier by arranging precise linear guide members such as linear guide rails in multiple lines capable of making the carrier smoothly travel or go up/down by preventing the occurrence of sticking. SOLUTION: This conveying device is configured of a carrier 10 supported by both side two line LM guides 21 and 22 and central two line LM guides 23 and 24 to move back and forth, a conveyer for transporting articles placed on the upper face of the carrier in a direction orthogonally crossing the traveling direction of a carrier in a receiving part and a sending part, and a linear motor 16 arranged under the carrier 10 through a deformed square cylindrical linking plate spring 20. A moving member 17 of the linear motor 16 being a linear driving member is arranged at the central part of the lower face of the linking plate spring 20, and a fixture 18 of the linear motor is arranged between the central two lines 23 and 24. Moment generated due to the deviation of the center of gravity of the work is supported by the reaction force of the linking plate spring 20 during traveling so that any sticking between the carrier and the LM guides 23 and 24 can be prevented, and that the carrier can be made to smoothly travel. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004200488(A) 申请公布日期 2004.07.15
申请号 JP20020368525 申请日期 2002.12.19
申请人 SANKI ENG CO LTD 发明人 JIN MOTOI
分类号 H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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