| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance inspection precision (inspection precision for a protrusion and a recess on a painting surface) on the painting surface. <P>SOLUTION: An irradiation device 3 is constituted of bright portions comprising head parts of a plurality of independent light emitting diodes 6 dispersion-arranged along two-dimensional directions comprising the first direction and the second direction crossed with the first direction, and a dark portion 5 other than the plurality of bright portions, and the painting surface is imaged under the condition where inspection light is emitted from the irradiation device, so as to extract a defect. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
