摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing method and a polishing plate of a color filter for a liquid crystal display for uniformly polishing a color filter surface in the whole surface of a glass substrate even if the size of the glass substrate further becomes the large area to about 900 mm × 1,100 mm. <P>SOLUTION: A square polishing plate 2 longer than the length of the short edge of the large areal glass substrate 1 is arranged in parallel to the short edge of the large areal glass substrate, and while pressurizing a large areal glass substrate surface, the substrate is eccentrically rotated (3) with the vertical direction of the large areal glass substrate as the axis, and is rocked (4) in the short edge direction of the large areal glass substrate. When moving (14) and polishing the color filter surface in the long edge direction of the large areal glass substrate, the polishing plate having a plurality of pressurizing points and independently pressurizing-controlling the respective pressurizing points, is used as the square polishing plate. <P>COPYRIGHT: (C)2004,JPO&NCIPI |