| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method of the radius of the shoulder circular arc part for the wafer notch which enables the measurement of the radius of the shoulder circular arc part in the notch with a higher accuracy. SOLUTION: In the measuring method of the radius of the shoulder circular arc part for the notch of the semiconductor wafer, the shoulder circular arc partin a notch is extracted from the notch part contour data obtained from the image processing of the semiconductor wafer and the starting and ending points of the shoulder circular arc part in the notch are detected using an algorithm to determine the radius of the circular arc part. COPYRIGHT: (C)2004,JPO&NCIPI
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