| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer supporting member which can measure the surface temperature of a wafer accurately with good follow-up performance. SOLUTION: In the wafer supporting member, one of main surfaces of a plate-shaped ceramic member 2 is used to carry the wafer W thereon, a resistance heater 5 is provided on or within the other main surface of the ceramic member 2, a recess 9 is formed in the other main surface of the ceramic member 2, a temperature measuring unit having a temperature measuring element 8a and a lead wire 8 is inserted in the recess 9, the unit is held by a fixing member 17, and the length of a cover covering the temperature measuring element 8a of the unit exposed from the fixing member 17 is set to be 5 or 30 times the outer diameter of the cover. COPYRIGHT: (C)2004,JPO&NCIPI
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