ASSESSMENT AND OPTIMIZATION FOR METROLOGY INSTRUMENT
摘要
<p>Methods and related program product for assessing and optimizing metrology instruments by determining a total measurement uncertainty (TMU) based on precision and accuracy. The TMU is calculated based on a linear regression analysis and removing a reference measuring system uncertainty (URMS) from a net residual error. The TMU provides an objective and more accurate representation of whether a measurement system under test has an ability to sense true product variation.</p>
申请公布号
WO2004059247(A1)
申请公布日期
2004.07.15
申请号
WO2002US41180
申请日期
2002.12.20
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION;ARCHIE, CHARLES, N.;BANKE, JR. WILLIAM, G.