| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric element which can reduce the number of probes required for polarization treatment of a piezoelectric element and remove a dispersion in properties after polarization and achieve a structural simplification of a price reduction, a downsizing in the piezoelectric element, and the facilitation of polarization for many pieces, and a piezoelectric element which is suitable for it. <P>SOLUTION: This invention provides a manufacturing method for a piezoelectric element which beforehand forms a coupled electrode in such form that electrode films in the sections having the same directions of polarization are coupled with one another at a piezoelectric ceramic plate face, and then performs polarization treatment by applying voltage to the coupled electrode film, and partially eliminate the coupled electrode film after completion of polarization treatment thereby separating and processing it so that it may be an electrode film in the final form as a piezoelectric element. Moreover, this provides a piezoelectric element of such a constitution that its dividing processing can be performed on one side alone. Besides, this provides a piezoelectric element for an acceleration sensor where the above manufacturing method is applied. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
