INSPECTION SYSTEM FOR SEMICONDUCTOR CIRCUIT

摘要

PROBLEM TO BE SOLVED: To provide an inspection system for semiconductor circuit that can prevent a yield degradation of a semiconductor circuit by easily specifying the cause of a defect by analyzing the occurring detail of the defect at the point of the occurring time of the defect at the time of inspecting the semiconductor circuit.

SOLUTION: A controller 2 sets the inspected details of each inspection item to an inspection device 1 which inspects the semiconductor circuit and the inspection device 1 transmits measurement data to the controller 2 by performing inspections. Then the controller 2 discriminates the number of measurement data higher than a standard upper limit and the number of measurement data lower than a standard lower limit from the measurement data and transmits the numbers to a host computer 3 as inspected result data whenever the inspection of one semiconductor circuit ends. The host computer 3 manages the inspected result data as summed-up data and makes a yield degrading factor specifiable during the course of inspections performed one lot by one lot by making the analysis of the yield degrading factor easier by referring to a personal computer 4.

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