发明名称 APPARATUS AND SYSTEM FOR LIQUID DROPLET DISCHARGE, ELECTROOPTICAL DEVICE, METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE, METHOD FOR FORMING METAL WIRE, AND ELECTRONIC EQUIPMENT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an apparatus and a system for liquid droplet discharging, which can form (draw) a pattern with discharged liquid droplets with high precision and improve the throughput (production efficiency), an electrooptical device, a method for manufacturing the electrooptical device, a method for forming a metal wire, and electronic equipment. <P>SOLUTION: The liquid droplet discharging apparatus 1 has an apparatus main body 2, a work carrying table which supports a work, a Y-axial direction moving mechanism which moves the work carrying table in one horizontal direction (hereinafter "Y-axial direction") to the apparatus main body 2, a liquid droplet discharging head which discharges the liquid droplets to the work supported on the work carrying table, and at least one blow means 14 which blows gas under conditions nearly similar to the atmosphere wherein the liquid droplet discharging apparatus 1 is placed to the work supported on the work carrying table to dry the liquid droplets discharged onto the work. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004198856(A) 申请公布日期 2004.07.15
申请号 JP20020369061 申请日期 2002.12.19
申请人 SEIKO EPSON CORP 发明人 KOJIMA KENJI;YODA TATSUO
分类号 G02B5/20;B05C5/00;B05C9/12;B41J2/01;G02F1/13;H01L21/288;H01L51/50;H05B33/10;(IPC1-7):G02B5/20;H05B33/14 主分类号 G02B5/20
代理机构 代理人
主权项
地址