| 摘要 |
PROBLEM TO BE SOLVED: To reduce resonance affected sensitivity to a space between a cantilever and a sound source. SOLUTION: The cantilever 22 of this device based on a probe 12 is deflected by directing a beam of ultrasonic acoustic energy thereto to apply acoustic radiation pressure, in one embodiment of the present invention. The energy is generated by an ultrasonic actuator 16. The transmitted beam is converged preferably using a cylindrical lens 36 to be tightly focused one-dimensionally, and a beam 34 unfocused two-dimensionally is provided thereby. A power source such as an RF signal generator is operated to spread a spectrum of acoustic radiation with a time scale shorter or equivalent than/to an acoustic roundtrip time, in another embodiment of the present invention. COPYRIGHT: (C)2004,JPO&NCIPI |
