| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact light source device capable of emitting illuminating luminous flux having an appropriate NA (numerical aperture). <P>SOLUTION: The light source device is provided with a light valve 12, an elliptical reflection mirror 14 where the light valve 12 is arranged in the center of either ellipse of an elliptical rotating body and which is cut in almost the center between the centers of two ellipses, an aperture plane mirror 22 arranged at the aperture part of the reflection mirror 14, a filter reflector 24 arranged in a conical area linking the aperture part and the center of the other ellipse and inclined by 45° to an optical axis linking the centers C1 and C2 of the ellipses of a lens, and a light density uniformizing means where an incident surface 32 is arranged at a position conjugate to the center of the other ellipse on the reflection optical axis O2 of the reflector 24. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
