| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal heater capable of being made the distance between an object to be heated such as a semiconductor wafer, etc., and the heating surface of a heater constant and uniformly heating the object to be heated such as the semiconductor wafer, etc., since the flatness of the heating surface is secured. SOLUTION: The metal heater is composed of a plurality of metal plates and heating elements. The heating elements are sandwiched between the metal plates. The plurality of metal plates are made of the same material in quality. COPYRIGHT: (C)2004,JPO&NCIPI
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