| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-speed particle generation method which enables an efficient generation of high-speed particles by condensing a pulse laser light to a small spot on a high-speed particle generation target surface. <P>SOLUTION: In the high-speed particle generation method, the pulse laser light generated with a pulse laser light generation means is condensed to a specific condensing point and high-speed particles are generated by irradiating the high-speed particle generation target set on the specific condensing point with the pulse laser light. At the first step, a reference light is emitted from the specific condensing point, the wave front of the reference light is measured with a wave front measuring means and the measured wave front is stored as a reference wave front. At the second step, the wavefront of the pulse laser light generated by the pulse laser light generation means and having passed the specific condensing point is measured with the wave front measuring means. At the third step, the wave front of the pulse laser light generated from the pulse laser light generation means is compensated based on the reference wave front. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
