| 摘要 |
PROBLEM TO BE SOLVED: To provide a machine and a method of production, making work useful for considerably larger degree than that executed by micromachine technology. SOLUTION: A machine structure respectively, including a plurality of micromachine layers stacked on each other, and its making method are presented. Each machine structure includes a movable member, demarcated from a micro-structure of at least one layer of a plurality of the micro-machine layers, including stacks. In the case of manufacture, VLSI technique is used, the micro-machine layer is formed separately thereafter stacked on each other in an arrangement by a form of the stack, the machine structure is demarcated. COPYRIGHT: (C)2004,JPO&NCIPI
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