| 发明名称 |
ELECTRICALLY-COUPLED MICRO-ELECTRO-MECHANICAL FILTER SYSTEMS AND METHODS |
| 摘要 |
An electrically-coupled micro-electro-mechanical system (MEMS) filter system (200a) and method are disclosed. In one embodiment, the MEMS filter system (200a) comprises includes a first MEMS resonator (200a), and a second MEMS resonator (202b) electrically coupled to the first MEMS resonator (202a). |
| 申请公布号 |
WO2004027833(A3) |
申请公布日期 |
2004.07.15 |
| 申请号 |
WO2003US29929 |
申请日期 |
2003.09.23 |
| 申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
AYAZI, FARROKH;ANARAKI, SIAVASH, POURKAMALI |
| 分类号 |
H03H9/46;H03H9/52 |
主分类号 |
H03H9/46 |
| 代理机构 |
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