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发明名称
Halbleiterspeicherzelle und Verfahren zum Herstellen derselben
摘要
申请公布号
DE4443968(B4)
申请公布日期
2004.07.15
申请号
DE19944443968
申请日期
1994.12.09
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO
发明人
MAEDA, SHIGENOBU;INOUE, YASUO;KURIYAMA, HIROTADA;MAEGAWA, SHIGETO;KANAMOTO, KYOZO;IWAMATSU, TOSHIAKI
分类号
H01L27/10;H01L21/77;H01L21/8242;H01L21/84;H01L27/06;H01L27/108;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L27/108;H01L21/824
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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