发明名称 TIME-RESOLVED REFLECTION MEASURING METHOD AND TERAHERTZ TIME-RESOLVED REFLECTION MEASURING APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a time-resolved reflection measuring apparatus for easily obtaining accurate phase information. <P>SOLUTION: In a time-resolved reflection measuring method, a terahertz pulse light L4 is radiated to a parallel plate sample 9, a time-series waveform of a reflected terahertz pulse light L5 from the sample 9 is detected, and a characteristic of the sample 9 is measured. A reference signal is the reflected pulse light on a sample entrance face included in the reflected terahertz pulse light L5. A sample signal is a difference signal as the reflected terahertz pulse light L5 other than the reflected pulse light. The characteristic of the sample 9 is measured based on the reference signal and the sample signal. The phase information can be easily and accurately measured without measurement using a reference mirror etc. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004198250(A) 申请公布日期 2004.07.15
申请号 JP20020366951 申请日期 2002.12.18
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 USAMI MAMORU
分类号 G01J3/28;G01J11/00;G01N21/35;G01N21/3563;G01N21/3586;(IPC1-7):G01N21/35 主分类号 G01J3/28
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