| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-speed continuous image reinspection method capable of halting the movement of an object to be inspected in which a problem has occurred in the judgment result of inspection when a trigger signal of a part of the object to be inspected is acquired; returning the object to be inspected to a location at which reinspection can be performed; and performing an accurate retry so as to not only judge the quality of the object to be inspected and but also perform a retry operation again. SOLUTION: A trigger signal input counter is activated at the occurrence of the problem in the judgment result of trigger signal input type high-speed continuous image inspection. Which location the moving part of the object to be inspected is proceeded to is counted to return to a count obtained by adding a correction numerical value to the counted number, and counting is activated. The feeding of the part of the object to be inspected is reversed and returned to a specified location and proceeded by the amount of the added count at a low speed. The part of the object to be inspected in which the problem has occurred in the judgment result of inspection is retried. When the result of the retry has no problem, its feeding is returned to a high speed and shifted to normal inspection. In this way, it is possible to reinspect the part of the object to be inspected. COPYRIGHT: (C)2004,JPO&NCIPI
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