| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of detecting pressure with high sensitivity, and of reducing a manufacturing cost. SOLUTION: This pressure sensor is provided with: a semiconductor device 5 capable of detecting a pressure; a terminal 6 connected to the semiconductor device 5 by a bonding wire 7; a housing 3 having an accommodation space 4 for housing the semiconductor device 5, the bonding wire 7, and the terminal 6; a diaphragm 8 for sealing the accommodation space 4, and working fluid 9 sealed in the accommodation space 4 for transmitting a pressure applied to the diaphragm 8 to the semiconductor device 5. The working fluid 9 is a silicone-based oil, and the terminal 6 and the housing 3 are sealed by a fluorine-based adhesive 10. COPYRIGHT: (C)2004,JPO&NCIPI
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