| 摘要 |
PROBLEM TO BE SOLVED: To increase a Q value of a cantilever by restraining squeezing effect. SOLUTION: This cantilever for a scanning type probe microscope is provided with: a flexible beam 120 with one end 121 fixed to a base part 110; a probe 130 formed on the side of the other end 122 of the flexible beam 120; and a through-hole 140 formed in a region including the prove 130 and the side of the other end 122 of the flexible beam 120. COPYRIGHT: (C)2004,JPO&NCIPI
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