HEARTH LINER FOR ELECTRON BEAM DEPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a PBN hearth liner which does not cause cracks or breaks, and has excellent durability so as to be repeatedly usable for a long period of time. SOLUTION: In the hearth liner 1a for electron beam deposition, lip parts 3 outwardly extended via curved angular parts 2 from the upper ends of the vessel wall of a hearth liner body 4 consisting of PBN are formed. The radius R of each curved angular part is equal to or above the thickness t of the hearth liner body. The whole surface of the hearth liner body 4 is coated with an electroconductive film 5. The outer diameter d including the lip parts and the opening diameter D in the hearth liner body preferably lies in the relation of d/D≤1.5. COPYRIGHT: (C)2004,JPO&NCIPI