| 摘要 |
PROBLEM TO BE SOLVED: To prevent a top face of an electrode from being flawed by a probe. SOLUTION: In this test method, three processes are executed as follows: the first process for bringing the probe 20 into contact with, from a side face, a top face corner part 9 of the electrode 7 provided in a specimen 4 at a posture where a base end part 22 is more distant from the top faces 6, 8 of the specimen 4 than a tip part 24, the second process for sliding the probe 20 in an axis-directional tip 24 side with respect to the electrode 7, and the third process for inspecting an electric characteristic of the specimen 4 under the condition where a side face 26 of the probe 20 at the posture where the base end part 22 is more distant from the top faces 6, 8 of the specimen 4 than the tip part 24 is brought into pressure contact with the top face corner part 9 of the electrode 7. COPYRIGHT: (C)2004,JPO&NCIPI
|
