发明名称 |
Layered stacks and methods of production thereof |
摘要 |
Low dielectric constant layered materials and a methof for making said layered materials comprising the steps of: a) providing a surface; b) spinning a dielectric material on to the surface; c) curing the dielectric material to form a dielectric layer; d) spinning a low dielectric constant material on to the dielectric layer; and e) curing the low dielectric constant material to form a low dielectric constant layer. Each layer can be spun-on to the layered component and subsequently cured before additional layers are added or all layers can be spun-on to the layered component and then the entire stack is cured at once.
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申请公布号 |
US2004137153(A1) |
申请公布日期 |
2004.07.15 |
申请号 |
US20040466652 |
申请日期 |
2004.02.26 |
申请人 |
THOMAS MICHAEL;DANIELS BRIAN;APEN PAUL;NAMAN ANANTH;IWAMOTO NANCY;KOROLEV BORIS;LI BO |
发明人 |
THOMAS MICHAEL;DANIELS BRIAN;APEN PAUL;NAMAN ANANTH;IWAMOTO NANCY;KOROLEV BORIS;LI BO |
分类号 |
H01L21/312;H01L21/768;H01L23/532;(IPC1-7):B05D7/00;B32B9/04 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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