PRESSURE DETECTING SENSOR OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A pressure detecting sensor of semiconductor fabricating equipment is provided to avoid an accident caused by an uncontrollable pressure in a process chamber due to a contact defect by doubling a switch contact of a pressure detecting sensor. CONSTITUTION: A fixing unit(30) is operated by a pressure, formed as one body with the first and second fixing contact guides(32,34). An operating unit(20) is electrically contacted by the operation of the first and second fixing contact guides, formed as one body with the first and second operating contact guides(22,24). The operating unit forms dual switching contacts(26,28) with which the first and second operating contact guides and the first and second fixing contact guides come in contact when a pressure is applied.