SUCTION PAD INCLUDING PAD SECTION HAVING SUPPORT PART AND CYLINDRICAL PART AND SUPPORT SECTION FOR SUPPORTING CYLINDRICAL PART

摘要

PURPOSE: A suction pad including a pad section and a support section is provided to prevent vacuum breakage by preventing the support section from being spaced from a substrate. CONSTITUTION: A suction pad(1) includes a pad section(2), a support case(3) and a packing(4). The pad section(2) includes a support part(22) and a cylindrical part(23). The cylindrical part(23) is supported by the support case(3). A curved lower end(23a) of the cylindrical part(23) is supported by the support case(3) in such a manner that the curved lower end(23a) is transversely moved on a plane(31) of the support case(3). The pad section(2) is prevented from being inclined due to an interval between a ring surface(24) of the pad section(2) and an upper end(33). The packing(4) seals a vacuum section(34b) from an exterior.