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发明名称
摘要
申请公布号
JP3541946(B2)
申请公布日期
2004.07.14
申请号
JP20020364480
申请日期
2002.12.16
申请人
发明人
分类号
H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/20
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代理人
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