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发明名称
Lens barrel and projection aligner
摘要
申请公布号
EP0952490(B1)
申请公布日期
2004.07.14
申请号
EP19990108057
申请日期
1999.04.23
申请人
CANON KABUSHIKI KAISHA
发明人
SUDOH, YUJI
分类号
H01L21/027;G02B7/00;G02B7/02;G02B27/00;G03B21/00;G03F7/20;(IPC1-7):G03F7/20;G03F9/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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