TEMPERATURE-HUMIDITY CONTROL APPARATUS OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A temperature-humidity control apparatus of semiconductor fabricating equipment is provided to increase the efficiency of a combustion part as much as recycled energy by controlling the position of a water return line in which a heat exchange is carried out between returning water and the exhaust gas exhausted from the combustion part. CONSTITUTION: Water is stored in a water supply tank(11). A water supply pump and a water supply return line(13) transfer the stored water. A combustion part(30) burns the water supplied through the water supply pump to generate high temperature vapor by receiving predetermined fuel. An exhaust part(40) includes a connection line(41) and an exhaust line(42) that exhausts exhaust gas exhausted after combustion is completed in the combustion part. A heat exchanger(20) is installed between the water supply part and the combustion part, connected by the connection line. A boiler exhausts the exhaust gas having passed through the heat exchanger to the outside through the exhaust line. The water supply return line is so installed that the heat-exchanged water with the exhaust gas in the heat exchanger returns to a water supply tank.