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发明名称
Precursors for deposition of silicon nitride,silicon oxynitride and metal silicon oxynitrides
摘要
申请公布号
GB0412790(D0)
申请公布日期
2004.07.14
申请号
GB20040012790
申请日期
2004.06.08
申请人
EPICHEM LIMITED
发明人
分类号
C07F7/02;C07F7/10;C23C16/30;C23C16/34;H01L21/314;H01L21/316;H01L21/318
主分类号
C07F7/02
代理机构
代理人
主权项
地址
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