发明名称 Electromagnetic actuator and exposure apparatus having the same
摘要 An electromagnetic actuator having stationary and movable elements. The actuator includes a magnet arranged on one of the stationary and movable elements, a coil arranged on the other one of the stationary and movable elements, a first coolant channel formed near the coil, and a second coolant channel formed in or near a surface of at least one of the stationary and movable elements. The first coolant channel and the second coolant channel are formed between the coil and the surface or in the surface.
申请公布号 US6762516(B2) 申请公布日期 2004.07.13
申请号 US20020105327 申请日期 2002.03.26
申请人 CANON KABUSHIKI KAISHA 发明人 MARUYAMA HIROYUKI
分类号 H01L21/027;G03F7/20;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/00 主分类号 H01L21/027
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