System and method for performing selected optical measurements utilizing a position changeable aperture

摘要

A system and method for performing selected optical measurements on a sample is provided utilizing an optical coherence domain reflectometer which includes a diffraction grating. A broad band light source produces light having a short coherence length. A beamsplitter splits the light into a signal beam and a reference beam. A reference mirror is disposed to receive the reference beam. A lens brings the signal beam to focus on the sample. A diffraction grating receives reflections from the sample and from the reference mirror, the reflections being incident on the diffraction grating with respect to said diffraction grating normal such that a positive diffraction order from one of the reflections and a negative diffraction order from the other one of the reflections and a negative diffraction order from the other one of the reflections propagate along a common path. A lens collects the diffracted order from the diffraction grating directed along the common path and brings the diffracted orders to focus on a detector, the detector producing an output of said positive and negative diffracted orders received. A computer processes the output from the detector. In other versions of the invention, reflections from the sample are not directed onto the diffraction grating but instead are combined with a diffracted order from reflections from the reference mirror.