| 摘要 |
The lithographic affinity characteristics of a material, such as a polymer, are affected - and thereby selectively modulated - through implantation of one or more metallic materials, typically in the form of ion s and/or atoms (or molecules). The desired characteristics are achieved by bulk chemical modification of the material rather than by texturing or deposition of a new surface layer. In the case of a polymer system, for example, the metal impregnates the matrix, penetrating t o an observable depth without substantial surface accumulation.
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