发明名称 |
Surface acoustic wave device |
摘要 |
A surface acoustic wave device which utilizes excitation of a shear horizontal wave includes a piezoelectric substrate and an interdigital transducer provided on the piezoelectric substrate. The interdigital transducer includes at least three metal layers containing at least one first layer made of a metal with a density of approximately 15 g/cm<3 >or more as a major component and at least one second layer made of a metal with a density of about 12 g/cm<3 >or less. The volume of the first layer being in the range from about 20% to about 95% of the total volume of the interdigital transducer or the reflector.
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申请公布号 |
US6762533(B2) |
申请公布日期 |
2004.07.13 |
申请号 |
US20010847989 |
申请日期 |
2001.05.03 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
IWAMOTO TAKASHI;KOSHIDO YOSHIHIRO |
分类号 |
H03H3/08;H03H9/145;(IPC1-7):H01L41/04;H01L41/08;H01L41/18;H02N2/00 |
主分类号 |
H03H3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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