发明名称 |
Method of coating solution on substrate surface using a slit nozzle |
摘要 |
A slit nozzle is positioned above a surface of a substrate placed in a rotary coater, and, while the slit nozzle is translated parallel to the surface of the substrate a coating solution is ejected from the slit nozzle toward the glass substrate under conditions such that the effects of surface tension of the solution are minimized or substantially cancelled out, to uniformly coat the coating solution on substantially the entire surface of the substrate with minimum wasting of the solution.
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申请公布号 |
US6761930(B2) |
申请公布日期 |
2004.07.13 |
申请号 |
US20020199602 |
申请日期 |
2002.07.19 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
SAGO HIROYOSHI;FUJIYAMA SHIGEMI;SHIMAI FUTOSHI;UEHARA AKIRA |
分类号 |
G03F7/16;B05D1/02;B05D1/40;B05D7/00;H01L21/00;H01L21/027;(IPC1-7):B05D1/42 |
主分类号 |
G03F7/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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