发明名称 Workpiece support
摘要 In order to ensure uniform coating of workpieces, workpiece holders carrying said workpieces are rotatably mounted at the edge of a turntable, a plurality of which are fastened in succession at adjustable distances to a drivable shaft. In order to trigger intermittent rotations of the workpiece holders, a driver finger of a driving device engages in each case a drive wheel thereof on each revolution of the turntable, so that the workpiece holders are rotated relative to the turntable through a specific angle in a direction opposite to the direction of rotation of said turntable. In order that no readjustment of the driver finger is required, for example in the case of a change of distances between the turntables, said driver finger is fastened to an extension of a rotating ring, which is mounted on the turntable itself so as to be non-displaceable in the direction of the shaft but rotatable about said shaft. The extension cooperates with a rod serving as a stop, in such a way that rotation of the driving device together with the turntable is prevented.
申请公布号 US6761772(B2) 申请公布日期 2004.07.13
申请号 US20020141432 申请日期 2002.05.08
申请人 UNAXIS BALZERS AKTIENGESELLSCHAFT 发明人 GIACRI LAURENT;KUNZ ANTON
分类号 C23C14/50;C23C16/44;(IPC1-7):H01L21/00;C23C16/00 主分类号 C23C14/50
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