| 摘要 |
A laser working method, for conducting laser ablation working on a workpiece by irradiating the workpiece with a laser beam, includes the following steps. In working by projecting a mask pattern with the laser beam, a laser beam of plural pulses having a very high energy density in space and time, emitted from a laser oscillator that can oscillate with a pulse radiation time of 1 picosecond or less, is employed. Scanning illumination is conducted by relative movement of a source of the laser beam and the mask pattern. The relative movement between the source of the laser beam and the mask pattern may be conducted by a reciprocating movement in a direction perpendicular to an optical axis of the laser beam, asynchronously with laser oscillation, and a form of the mask pattern may be formed stepwise and in succession on the workpiece.
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