发明名称 Liquid crystal display device and fabrication method thereof
摘要 The present invention provides a novel photolithography processes using photoresist pattern having at least two areas which has different thickness from each other for a fabrication method for a liquid crystal display device having reversed staggered and channel-etched type thin film transistors, reduce a number of photolithography processes required for whole of the fabrication process of the liquid crystal display device, and improve brightness of the liquid crystal display device.
申请公布号 US6762802(B2) 申请公布日期 2004.07.13
申请号 US20010851942 申请日期 2001.05.10
申请人 RENESAS TECHNOLOGY CORP. 发明人 ONO KIKUO;NAKAYOSHI YOSHIAKI;OKE RYUTARO;KANEKO TOSHIKI
分类号 G02F1/136;G02F1/1343;G02F1/1362;G02F1/1368;G09F9/30;H01L21/302;H01L21/3065;H01L21/336;H01L29/786;(IPC1-7):G02F1/136;G02F1/134 主分类号 G02F1/136
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