发明名称 PROCESSING METHOD AND DEVICE
摘要 <p>A processing system has a processing section for continuously processing a member to be processed; an inspection section for inspecting a processed state of the member processed by the processing section; a processed state determination section for determining whether the processed state is defective/nondefective, on the basis of a result of inspection performed by the inspection section; a continuity determination section for determining whether or not a defective determination is continuously made when the processed state is determined to be defective by the processed state determination section; and a processing control section for controlling processing so as to stop processing of the member continuously performed by the processing section when the continuity determination section determines that the defective determination is continuously made.</p>
申请公布号 AU2003289409(A1) 申请公布日期 2004.07.09
申请号 AU20030289409 申请日期 2003.12.17
申请人 TOKYO ELECTRON LIMITED 发明人 YASUHIRO OKUMOTO;WATARU KARASAWA
分类号 H01L21/66;G05B23/02;H01L21/00;(IPC1-7):H01L21/302 主分类号 H01L21/66
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