发明名称 TERAHERTZ SPECTRAL DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To enable reflection spectrum measurement and transmission spectrum measurement, using a terahertz light with a single spectral device. <P>SOLUTION: A reflection measurement optical system for irradiating a sample S (a location A) with terahertz pulse light and detecting a reflection light reflected from the sample and a transmission measurement optical system for irradiating the sample S (a location B) with the terahertz pulse light and detecting a transmission light transmitted through the sample can be switched. A detected light, as the reflection light or the transmission light, is measured by a time-series conversion terahertz spectrum. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004191302(A) 申请公布日期 2004.07.08
申请号 JP20020362244 申请日期 2002.12.13
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 IWAMOTO TOSHIYUKI
分类号 G01J3/28;G01N21/35;G01N21/3586;(IPC1-7):G01N21/35 主分类号 G01J3/28
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