| 摘要 |
A method for reducing effects of common mode oscillations between two respective proof masses in micro-electromechanical systems (MEMS) devices is described. The MEMS devices also include a motor pickoff comb, a sense plate, and a motor drive comb for each proof mass. The method includes amplifying signals received from respective motor pickoff combs, inverting the amplified signal from one of the motor pickoff combs, and generating a difference signal between the inverted, amplified signal from one pickoff comb, and the non-inverted, amplified signal from the other pickoff comb. The method also includes inputting the difference signal into a control loop and generating motor drive signals for respective motor drive combs with the control loop.
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