MANUFACTURING METHOD OF RADIOLOGICAL IMAGE CONVERSION PANEL

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a radiological image conversion panel having improved sensitivity.

SOLUTION: In this manufacturing method of the radiological image conversion panel including a process for forming a phosphor layer by depositing on a substrate a material generated by heating an evaporation source containing a halogen-containing phosphor or its raw material, deposition is performed in a deposition atmosphere having a partial pressure of hydrogen halogenide of 2.0×10-5Pa or higher.

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