MOVEMENT CONTROL METHOD, MOVEMENT CONTROLLER, ALIGNER AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a stage control method and a stage controller with which a stage can stably and precisely be moved by suppressing the reaction force caused when moving the stage as much as possible, and to provide an aligner for improving the overlay precision by providing the stage controller. SOLUTION: A stage device is provided with two shaft linear motors 35 and 36 driving the reticle stage 12 in a direction of Y, and two linear motor sets 51a and 51b driving counter masses 39a and 39b which can be moved in the direction of Y for preventing the reaction force caused by the acceleration or deceleration of the reticle stage 12. For controlling the movement of the stage device, the linear motor sets 51a and 51b are driven by driving force obtained based on an actual weight ratio of the reticle stage 12 and the counter masses 39a and 39b. COPYRIGHT: (C)2004,JPO&NCIPI