摘要 |
PROBLEM TO BE SOLVED: To increase the S/N ratio of a stress sensor wherein a stress is applied to a resistance element 5 formed by disposing a resistor 3 between pair-making electrodes 2, the resistance element 5 is stimulated by the stress to change its resistance value, and the stress is detected based on the change. SOLUTION: The resistor 3 has one or more trimming holes 1, each having a round shape, a shape similar thereto, or an outline shape resultantly formed by partly overlapping them, and/or one or more cutout parts 7 for trimming, each having a circular arc shape, a shape similar thereto, or an outline shape resultantly formed by partly overlapping them. COPYRIGHT: (C)2004,JPO&NCIPI
|