| 摘要 |
PROBLEM TO BE SOLVED: To provide method for inspecting stacked gas sensor elements capable of reliably and easily detecting defective items caused by defects such as gaps and cracks. SOLUTION: In a stacked gas sensor element 1 having a sensor cell, an electrode on the side of a gas to be measured is coated and laminated with a porous diffuse resistor layer, and the diffuse resistor layer 141 is coated and laminated with a dense protective layer 142. At inspection on the stacked gas sensor element 1, the stacked gas sensor element 1 is immersed in a conductive inspection liquid, and a reference electrode 131 is not in contact with the conductive inspection liquid 2. A voltage is impressed between the conductive inspection liquid 2 and the reference electrode 131. A current value passing between the conductive inspection liquid 2 and the reference electrode 131 is measured to determine whether insulation is secured between the conductive inspection liquid 2 and the reference electrode 131 or not. COPYRIGHT: (C)2004,JPO&NCIPI
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